Micro-X-ray Fluorescence(micro-XRF)spectroscopy is a non-destructive analytical technique that can be used next to Energy Dispersive Spectroscopy(EDS)on a Scanning Electron Microscope(SEM). The X-ray source in QUANTAX micro-XRF analyzes light and heavy elements with high energy X-rays, scans topographic samples with a patented Aperture Management System, accurately analyzes powders via large spot size measurements and automates analysis processes with motorized source insertion and retraction.