ARAB LAB 2024Products & Services RTP-200 for 8" wafer size

RTP-200 for 8" wafer size

Exhibitor
UniTemp GmbH

We are the only company offering such a compact 8" RTP system!
This is quite new in our portfolio and closes the gap between the 6" and 12" system.
It accepts a 8" wafer for single processing. We offer a standard unit or a high vacuum option. All kind of features are available.
Further reading

RTP-200 for processing of a 8" wafer up to 1200 °C and optionally with high vacuum up to 10-6 hPa

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